Sliding components for pumps and seals, components for manufacturing equipment of semiconductors and LCDs, etc. are produced in integrated operations comprising the preparation of raw materials to the final product.
![Special Material](./images/title_page.png)
Special Materials
ENGINEERING CERAMICSJapan Fine Ceramics Co.,Ltd.
Engineering Ceramics Manufacturing Process
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Silicon Carbide (SiC)
![Silicon Carbide (SiC)](./images/sm_img1.png)
Silicon carbide has excellent
chemical resistance and stable
high-temperature properties.
With the use of a specially designed
large atmospheric furnace, long and
large diameter products can be provided.
- ・Excellent mechanical strength at high temperatures
- ・High thermal conductivity
- ・Wear resistance
- ・Corrosion resistance
- Sliding components
(mechanical seals, bearings, etc.) - Components for chemical pumps
(shafts, bearings, etc.) - Components for semiconductor and LED manufacturing equipment
(wafer forks, wafer chucks, thrusting pins, susceptors, MOCVD trays, etc.) - Wear resistant components
(blast nozzles, crusher liners, etc.) - Heat resistant component
(burner nozzles, components for heat exchangers, etc.)
Silicon Nitride (Si3N4)
![Silicon Nitride (Si3N4)](./images/sm_img2.png)
Silicon nitride has excellent thermal shock resistance.
Furthermore, due to having high
mechanical strength at high temperatures and excellent wear resistance, silicon
nitride is used in variety industrial equipment.
- ・Thermal shock resistance
- ・Excellent mechanical strength at high temperature
- ・Wear resistance
- ・Corrosion resistance
- ・Electrical insulating properties
- Bearing components
- Components for semiconductor and LCD manufacturing equipment (inspection tables for IC, clampers, chucks, thrusting pins, focus rings, etc.)
- Components for semiconductor and LED manufacturing equipment
(wafer forks, wafer chucks, thrusting pins, susceptors, MOCVD trays, etc.) - Wear resistant components
(motor shafts, bearings,etc.) - Heat resistant components
(burner nozzles, crucibles for melting metal, squeeze rolls, etc.)
Alumina (Al2O3)
![Alumina (Al2O3)](./images/sm_img3.png)
Aluminum has excellent electrical insulating properties and is the most popular material for this purpose due to its well-balanced properties.
Alumina is also used in etching equipment due to its high resistance to corrosion and plasma.
- ・Electrical insulating properties
- ・High fracture toughness at room temperature
- ・Heat resistance
- ・Wear resistance
- ・Corrosion resistance
- Components for semiconductor manufacturing equipment (chamber components, insulating flanges, wafer forks, etc.)
- Electrical insulating components (insulators, spacers,bushes, etc.)
- General industrial machinery components (shafts, bearings, etc.)
- Wear resistant components (thread paths, rails, guides, etc.)
Zirconia(ZrO2)
![Zirconia(ZrO2)](./images/sm_img4.png)
Zirconia has excellent mechanical strength
and fracture toughness at room
temperature and is characterized by having a low thermal conductivity.
Furthermore, practical applications in precision machined components are growing as its small material grain enables high-precision finish machining.
- ・High mechanical strength at room temperature
- ・High fracture toughness at room temperature
- ・Thermal expansion similar to that of metal
- ・Wear resistance
- ・Heat insulating properties
- Molds, jigs, and tools (various molds, precision positioning jigs, heat treatment jigs, insulating jigs, etc.)
- Base materials for blades (slitters, etc.)
- Wear resistant components (crushing machine parts, guide rollers, chuck claws for automated machinery, etc.)